Electrostatic discharge protection devices
US10153270B2 · kind B2 · utility
7Cited by
10References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 19, 2015 |
| Grant date | Dec 11, 2018 |
| Priority date | — |
| Expiry date | Oct 16, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D89/60
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An ESD protection device includes a substrate having an active fin extending in a first direction, a plurality of gate structures extending in a second direction at a given angle with respect to the first direction and partially covering the active fin, an epitaxial layer in a recess on a portion of the active fin between the gate structures, an impurity region under the epitaxial layer, and a contact plug contacting the epitaxial layer. A central portion of the impurity region is thicker than an edge portion of the impurity region, in the first direction. The contact plug lies over the central portion of the impurity region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.