Patent · US Active

Manganese complexes and use thereof for preparing thin films

US10155783B2 · kind B2 · utility

1Cited by
3References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 28, 2014
Grant dateDec 18, 2018
Priority date—
Expiry dateDec 21, 2034

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB01J2531/72
  • WIPO fieldOrganic fine chemistry
  • WIPO sectorChemistry

Abstract

Manganese complexes, methods of making the same, and use thereof in thin film deposition, such as CVD and ALD are provided herein.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.