Preferably oriented nanotwinned Au film, method of preparing the same, and bonding structure comprising the same
US10161054B2 · kind B2 · utility
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8Claims
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Key dates
| Filing date | Jul 24, 2017 |
| Grant date | Dec 25, 2018 |
| Priority date | — |
| Expiry date | Jul 24, 2037 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC25D21/10
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention is related to a preferably oriented nanotwinned Au film, a method of preparing the same, and a bonding structure comprising the same. The nanotwinned Au film has a thickness direction. The nanotwinned Au film is stacked along a [220] crystallographic axis orientation in the thickness direction. At least 50% by volume of the nanotwinned Au film is composed of a plurality of nanotwinned Au grains which are adjacent to each other, arranged in a direction perpendicular to the thickness direction, and stacked along a [111] crystallographic axis orientation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.