Systems and methods for electrically testing electromigration in an electromigration test structure
US10161994B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 14, 2016 |
| Grant date | Dec 25, 2018 |
| Priority date | — |
| Expiry date | Nov 17, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2818
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods for electrically testing electromigration in an electromigration test structure are disclosed herein. The systems include a voltage control portion, a current control portion, and a current regulating structure. The systems further include an electric current detector, a first system connection, and a second system connection. The systems also include a voltage detector, and a controller. In some embodiments of the methods, a voltage control portion regulates a high-side signal electric current to maintain a voltage difference below a voltage setpoint while a current control portion maintains the high-side signal electric current below a threshold current value. In some embodiments of the methods, one of the voltage difference and a magnitude of the high-side signal electric current is selected as a primary control parameter while the other is selected as a compliant control parameter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.