Apparatus for shielding reticle
US10162276B2 · kind B2 · utility
0Cited by
3References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 7, 2016 |
| Grant date | Dec 25, 2018 |
| Priority date | — |
| Expiry date | Apr 7, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67069
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present disclosure provides an apparatus. The apparatus comprises a field generator, configured to produce a field shield protecting a reticle from foreign particles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.