Probe assembly with high bandwidth beam
US10163601B1 · kind B1 · utility
1Cited by
4References
25Claims
0Family size
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Key dates
| Filing date | Dec 28, 2017 |
| Grant date | Dec 25, 2018 |
| Priority date | — |
| Expiry date | Dec 28, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24592
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A probe assembly for analyzing a test device that includes a housing with an electron source disposed therein for emitting primary electrons. A photon source is positioned to emit photons that strike the electron source such that when the photons strike the electron source, the electron source emits the primary electrons. Detection circuitry is provided that is configured to detect secondary electrons emitted from a test device of a test assembly and to form an excitation waveform.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.