Polymer resin comprising gap filling materials and methods
US10163631B2 · kind B2 · utility
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84References
19Claims
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Key dates
| Filing date | Sep 11, 2017 |
| Grant date | Dec 25, 2018 |
| Priority date | — |
| Expiry date | Sep 11, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02118
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In accordance with an embodiment a bottom anti-reflective layer comprises a surface energy modification group which modifies the surface energy of the polymer resin to more closely match a surface energy of an underlying material in order to help fill gaps between structures. The surface energy of the polymer resin may be modified by either using a surface energy modifying group or else by using an inorganic structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.