Bubble removing unit and substrate treating apparatus including the same
US10166492B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 28, 2016 |
| Grant date | Jan 1, 2019 |
| Priority date | — |
| Expiry date | Dec 22, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D19/0052
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A bubble removing unit is disclosed including a body having an inner space, through which a liquid flows, in an interior thereof, a liquid introducing pipe through which the liquid is supplied to the body, a liquid discharging pipe through which the liquid, from which bubbles are removed, is discharged from the body, a bubble discharging pipe through which the bubbles are discharged from the inner space, and a rod-shaped bar situated in the inner space and a length of which extends in a lengthwise direction of the body, wherein a variable cross-section part situated between the liquid introducing pipe and the liquid discharging pipe and a cross-section of which varies along the lengthwise direction of the body is provided in the inner space of the body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.