Electromagnetic radiation detector encapsulated by transfer of thin layer
US10168223B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 25, 2018 |
| Grant date | Jan 1, 2019 |
| Priority date | — |
| Expiry date | Apr 25, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/0875
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electromagnetic radiation detector comprising: at least one membrane suspended above a substrate; and a cap, closing a hermetic cavity including the at least one membrane. According to the invention: the thickness of the cap is less than or equal to 10 μm; the cap bears at least on support walls surrounding the membrane(s); and the detector has first and second metallic sealing layers intercalated on each other between the cap and the support walls, and between which a peripheral bonding zone extends. The invention also relates to a method of making such a detector. The invention provides an encapsulation solution using a thin cap, in which the membranes are not subjected to high temperatures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.