Patent · US Active

Switching device

US10170470B2 · kind B2 · utility

2Cited by
5References
5Claims
0Family size

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Key dates

Filing dateAug 23, 2017
Grant dateJan 1, 2019
Priority date
Expiry dateAug 23, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/8325

Abstract

A switching device may include a semiconductor substrate; gate trenches; bottom insulating layers covering bottom surfaces of the gate trenches; gate insulating layers covering side surfaces of the gate trenches; and gate electrodes arranged in the gate trenches. The gate insulating layers in a center portion may have a first thickness and a first dielectric constant, and one or more of the gate insulating layers in a peripheral portion may have, within at least a part of the peripheral portion, a second thickness thicker than the first thickness and a second dielectric constant greater than the first dielectric constant. The semiconductor substrate may include a first region being in contact with the gate insulating layers, a body region being in contact with the gate insulating layers under the first region, and a second region being in contact with the gate insulating layers under the body region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.