Niobium-containing film forming compositions and vapor deposition of Niobium-containing films

US10174423B2 · kind B2 · utility

Assignee

• L'Air Liquide, Societe Anonyme Pour l'Etude et l'Exploitation des Procedes Georges Claude · FR

Inventors

• Clément Lansalot-Matras · Tsukuba, JP
• Jooho LEE · Seoul, KR
• Wontae Noh · Seoul, KR

Key dates

• Filing date: Jun 28, 2017
• Grant date: Jan 8, 2019
• Expiry date: Jun 28, 2037

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C01P2006/40
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Disclosed are Niobium-containing film forming compositions, methods of synthesizing the same, and methods of forming Niobium-containing films on one or more substrates via atomic layer deposition processes using the Niobium-containing film forming compositions.