Patent · US Active

Sample vessel retention structure for scanning probe microscope

US10175263B2 · kind B2 · utility

1Cited by
5References
23Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 15, 2016
Grant dateJan 8, 2019
Priority date
Expiry dateJun 15, 2036

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01Q30/16
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A sample vessel retention mechanism for an inverted microscope having an optical objective and a scanning probe microscope (SPM) head. The inverted microscope includes a platform for supporting a sample vessel, in which is formed an aperture sized to provide a passage for the objective of the inverted microscope to approach the sample vessel from below. The retention mechanism provides a vacuum region formed in the platform, with the vacuum region being barometrically coupled with a vacuum generator. Establishment of a vacuum in the vacuum region prevents or substantially reduces oscillation of the sample vessel floor in an operating frequency range of the SPM head.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.