Test standards and methods for impedance calibration of a probe system, and probe systems that include the test standards or utilize the methods

US10180486B2 · kind B2 · utility

Assignee

• FormFactor Beaverton, Inc. · US

Inventors

• Daniel Bock · Heidelberg, DE
• Samantha Nhim · Tigard, US
• Lynh Bui · Tigard, US

Key dates

• Filing date: Mar 16, 2016
• Grant date: Jan 15, 2019
• Expiry date: Mar 18, 2036

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L22/34
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Test standards and methods for impedance calibration of a probe system and probe systems that include the test standards and/or utilize the methods are disclosed herein. The test standards include at least one test structure. In some embodiments, the test standard further includes an alignment structure that is associated with the test structure. In some embodiments, the test standards include a plurality of test structures. In some embodiments, the plurality of test structures includes a thin film thru test structure and a thin film offset test structure. In some embodiments, the plurality of test structures is positioned to simultaneously contact a plurality of probe regions of a probe head. The methods include methods of calibrating a probe system.