Patent · US Active

Method for manufacturing a wafer of semiconducting material based on a group 13 element nitride

US10181399B2 · kind B2 · utility

0Cited by
1References
11Claims
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Key dates

Filing dateJul 27, 2015
Grant dateJan 15, 2019
Priority date
Expiry dateJul 27, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10H20/825
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method for manufacturing a semi-conducting material including a layer of nitride of a group 13 element comprising active areas for manufacturing electronic components, and inactive areas, the active and inactive areas extending on a front face of the layer of nitride, the method comprising steps consisting of:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.