Condensing point position detecting method
US10183359B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 5, 2018 |
| Grant date | Jan 22, 2019 |
| Priority date | — |
| Expiry date | Apr 5, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/78
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
There is provided a condensing point position detecting method of detecting a position in an optical axis direction of a condensing point of a laser beam condensed by a condenser of a laser processing apparatus. The condensing point position detecting method includes: an irradiation mark forming step of forming a plurality of irradiation marks in a substrate by irradiating the substrate held by a chuck table with the laser beam while moving the condenser in the optical axis direction with respect to the substrate; and a condensing point position detecting step of detecting an irradiation mark having a proper shape from the plurality of irradiation marks formed in the substrate, and detecting the position of the condensing point forming the proper irradiation mark as a position of an accurate condensing point.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.