Patent · US Active

Adapter tool configured to be attached to a loadport of a wafer handling system and wafer handling system with such an adapter tool

US10186440B2 · kind B2 · utility

0Cited by

10References

15Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Michael Larisch · Regensburg, DE
Ulrich Beck · Mintraching, DE
Michael Walser · Schaan, LI

Key dates

Filing date	May 30, 2017
Grant date	Jan 22, 2019
Priority date	—
Expiry date	May 30, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/6835
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

An adapter tool configured to be attached to a loadport of a wafer handling system includes a support member and first and second guiding elements attached to the support member and being juxtaposed to each other. The first guiding element is arranged for placing a first wafer magazine, and the second guiding element is arranged for placing a second wafer magazine. The adapter tool further includes a housing supported by the support member and configured to house the first and the second wafer magazines, respectively, and first and second openings in the housing, respectively. The first and second openings are aligned with the first and second guiding elements.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.