Patent · US Active

MEMS device and MEMS vacuum microphone

US10189699B2 · kind B2 · utility

13Cited by

3References

13Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Arnaud Walther · Grenoble, FR
Alfons Dehe · Reutlingen, DE
Johann Strasser · Schierling, DE
Gerhard Metzger-Brueckl · Geisenfeld, DE

Key dates

Filing date	Nov 21, 2017
Grant date	Jan 29, 2019
Priority date	—
Expiry date	Nov 21, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2201/003
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

In accordance with an embodiment, a MEMS device includes a first membrane element, a second membrane element spaced apart from the first membrane element, a low pressure region between the first and second membrane elements, the low pressure region having a pressure less than an ambient pressure, and a counter electrode structure comprising a conductive layer, which is at least partially arranged in the low pressure region or extends in the low pressure region. The conductive layer includes a segmentation providing an electrical isolation between a first portion of the conductive layer and a second portion of the conductive layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.