Acceleration sensor
US10191078B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 17, 2016 |
| Grant date | Jan 29, 2019 |
| Priority date | — |
| Expiry date | Dec 22, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0828
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An acceleration sensor includes a detection device, an opposed electrode, and a top lid. The detection device includes an active layer, a base layer, an oxide layer disposed between the active layer and the base layer, a first insulating layer, a contact portion, and a self-check electrode. The first insulating layer is disposed on the active layer at a side opposite to the oxide layer and provided with a first opening. The contact portion is disposed on a part of the first insulating layer at a side opposite to the active layer and includes a first metal layer connected to the active layer through the first opening. The opposed electrode is disposed at a location opposing the self-check electrode, and the top lid supports the opposed electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.