Patent · US Active

Lift pin for substrate processing

US10195704B2 · kind B2 · utility

5Cited by

3References

20Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Christian Himmelsbach · Villach, AT
Joachim Hirschler · Villach, AT
Helmut Brunner · Leonberg, DE

Key dates

Filing date	Mar 15, 2013
Grant date	Feb 5, 2019
Priority date	—
Expiry date	Sep 13, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/68742
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

Lift pins and devices having lift pins are provided. According to an aspect, a lift pin may have a tapered distal portion. According to another aspect, a lift pin may have two portions threadedly engaged with each other. According to yet another aspect, a lift pin may be mounted to a lifting plate with slackness.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.