Dual-probe scanning probe microscope
US10197595B2 · kind B2 · utility
3Cited by
12References
6Claims
0Family size
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Inventor
Key dates
| Filing date | Mar 22, 2016 |
| Grant date | Feb 5, 2019 |
| Priority date | — |
| Expiry date | Mar 22, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method of positioning a probe of an atomic force microscope (AFM) includes using a dual probe configuration in which two probes are fabricated with a single base, yet operate independently. Feedback control is based on interaction between the reference probe and surface, giving an indication of the location of the surface, with this control being modified based on the difference in tip heights of the two probes to allow the sensing probe to be positioned relative to the sample at a range less than 10 nm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.