Patent · US Active

Delamination-resistant semiconductor device and associated method

US10199333B2 · kind B2 · utility

0Cited by
4References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 5, 2017
Grant dateFeb 5, 2019
Priority date
Expiry dateJul 10, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10F39/026
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A delamination-resistant semiconductor device includes a conductive layer, a semiconductor layer, and a spacer. The conductive layer has a first side opposite a second side. The semiconductor layer is on the first side and defines an aperture therethrough spanned by the conductive layer. The spacer is on the second side and has a top surface, proximate the conductive layer, that defines a blind hole spanned by the conductive layer. A method for preventing delamination of a multilayer structure, includes a step of disposing a first layer on a substrate such that the first layer spans an aperture of the substrate. The method also includes a step of disposing a second layer on the first layer. The second layer has a blind hole adjacent to the first layer such that the first layer spans the blind hole.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.