Optical element unit for exposure processes

US10203607B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Tilman Schwertner · Aalen, DE
• Ulrich Bingel · Michelfeld, DE
• Guido Limbach · Aalen, DE
• Julian Kaller · Oberkochen, DE
• Hans-Juergen Scherle · Aalen, DE
• Jens Kugler · Heubach, DE
• Dirk Schaffer · Jena, DE
• Bernhard Gellrich · Aalen, DE

Key dates

• Filing date: Dec 4, 2014
• Grant date: Feb 12, 2019
• Expiry date: Dec 13, 2037

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical element unit including a first optical element module and a sealing arrangement is disclosed. The first optical element module occupies a first module space and includes a first module component of a first component type and an associated second module component of a second component type. The first component type is optical elements and the second component type being different from the first component type. The sealing arrangement separates the first module space into a first space and a second space and substantially prevents, at least in a first direction, the intrusion of substances from one of the first space and the second space into the other one of the first space and the second space. The first module component at least partially contacts the first space and, at least in its area optically used, not contacting the second space. The second module component at least partially contacts the second space.