Patent · US Active

MEMS devices on flexible substrate

US10207916B2 · kind B2 · utility

0Cited by

22References

16Claims

0Family size

Assignee

3M INNOVATIVE PROPERTIES COMPANY · US

Inventors

Phillip J. Bergeron · Austin, US
Brent D. Lunceford · Austin, US
John D. Geissinger · Austin, US
Douglas B. Gundel · Cedar Park, US
Justine A. Mooney · Austin, US
Ravi Palaniswamy · Singapore, SG
Siang Sin Foo · Singapore, SG

Key dates

Filing date	May 11, 2015
Grant date	Feb 19, 2019
Priority date	—
Expiry date	Jun 5, 2035

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2207/053
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A flexible film including one or more MEMS elements and articles including the flexible film are described. The flexible film includes a polymer layer between two metal layers with one of the metal layers containing a perforation. The polymer layer includes voided regions that allow for relative movement of the two metal layers.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.