Patent · US Active

X-ray inspection system and method for rotating a test object by means of such an X-ray inspection system

US10209204B2 · kind B2 · utility

3Cited by

1References

10Claims

0Family size

Assignee

YXLON INTERNATIONAL GMBH · DE

Inventors

Andreas Mecke · Glinde, DE
Jan Spalding · Rellingen, DE
Axel Klein · Siegen, DE

Key dates

Filing date	Oct 21, 2014
Grant date	Feb 19, 2019
Priority date	—
Expiry date	Jan 30, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG01N2223/419
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An X-ray inspection system includes an X-ray source and a detector. A rotary table is arranged between the X-ray source and the detector. The rotary table is configured to secure a test object on the rotary table. The rotary table is arranged on a positioning table. The positioning table is configured to move parallel to an xy-plane between the X-ray source and the detector. The xy-plane is perpendicular to a surface of the detector extending parallel to the xz-plane and the rotary table is configured to rotate about a z-axis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.