Sensor arrangement for particle analysis and a method for particle analysis

US10209212B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Guenther Ruhl · Regensburg, DE
• Thomas R. Hirsch · Malibu, US
• Gerhard Poeppel · Duggendorf, DE
• Herbert Roedig · Riemerling, DE

Key dates

• Filing date: Feb 15, 2016
• Grant date: Feb 19, 2019
• Expiry date: Mar 16, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2027/222
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

According to various embodiments, a sensor arrangement for particle analysis may include: a base electrode configured to generate an electrical field for particle attraction; a support layer disposed over the base electrode; a sensor array disposed over the support layer and including or formed from a plurality of sensor elements, wherein each sensor element of the plurality of sensor elements is configured to generate or modify an electrical signal in response to a particle at least one of adsorbed to and approaching the sensor element; and an electrical contact structure may include or be formed from a plurality of contact lines, wherein each contact line of the plurality of contact lines is electrically connected to a respective sensor element of the plurality of sensor elements, such that each sensor element of the plurality of sensor elements is addressable via the contact structure.