Charged particle beam device, optical device, irradiation method, diffraction grating system, and diffraction grating
US10210962B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 5, 2014 |
| Grant date | Feb 19, 2019 |
| Priority date | — |
| Expiry date | Jun 2, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K2201/067
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The outer shape and size of a diffraction grating including an edge dislocation is made smaller than the irradiation areas of light waves and electromagnetic waves, by using an opener different from in the diffraction grating, the shape and size of the opening is superposed on the shape of a spiral wave that is generated by an edge dislocation diffraction grating, and the shape and size of the opening are reflected in the shape and size of the spiral wave on the diffractive surface. In addition, not only a diffraction grating system including a pair of a single opener and a single diffraction grating, but also a diffraction grating system in which plural openers and plural edge dislocation diffraction gratings are combined are used, and plural spiral waves can be generated on the diffractive surface with a higher degree of freedom.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.