Patent · US Active

Image sensor device with reflective structure and method for forming the same

US10211244B2 · kind B2 · utility

2Cited by
3References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 30, 2017
Grant dateFeb 19, 2019
Priority date
Expiry dateJun 30, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10F39/807

Abstract

An image sensor device is provided. The image sensor device includes a semiconductor substrate having a front surface, a back surface opposite to the front surface, at least one light-sensing region close to the front surface, and a first trench surrounding the light-sensing region. The first trench has an inner wall and a bottom surface. The image sensor device includes an insulating layer covering the back surface, the inner wall, and the bottom surface. A thickness of a first upper portion of the insulating layer in the first trench increases in a direction away from the front surface, and the insulating layer has a second trench partially in the first trench. The image sensor device includes a reflective structure filled in the second trench. The reflective structure has a light reflectivity ranging from about 70% to about 100%.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.