Patent · US Active

Micro-electro-mechanical system sensor devices

US10214413B2 · kind B2 · utility

0Cited by

1References

21Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Gunar Lorenz · Voisins-le-Bretonneux, FR
Nikolay Ilkov · Munich, DE
Georg Lischka · Poing, DE

Key dates

Filing date	Nov 21, 2017
Grant date	Feb 26, 2019
Priority date	—
Expiry date	Nov 21, 2037

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2203/0127
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A MEMS sensor device includes an electrically conductive membrane and an electrically conductive closed loop structure. The closed loop structure is arranged in proximity to the membrane and is configured to reduce eddy currents in the membrane.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.