Optical element module with minimized parasitic loads

US10215948B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Jens Kugler · Heubach, DE
• Ulrich Weber · Ulm, DE
• Dirk Schaffer · Jena, DE

Key dates

• Filing date: Nov 30, 2012
• Grant date: Feb 26, 2019
• Expiry date: Aug 8, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70825
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical element module includes an optical element unit and a support structure. The optical element module includes an optical element. The support structure includes a support device and a contact device connected to the support device. A surface of the contact device contacts a surface of the optical element unit and exerts a holding force on the optical element unit along a holding force direction.