Inspection of objects based on primary and secondary scanning
US10228486B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 22, 2016 |
| Grant date | Mar 12, 2019 |
| Priority date | — |
| Expiry date | Aug 22, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01T1/167
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Techniques and systems for two scanners to inspect objects based on an initial scanning of all objects and an additional scanning of objects that are determined by the initial scanning to potentially include one or more suspect regions. In one implementation, a system can include a primary scanner for performing the initial or primary scanning and a smaller secondary scanner for the additional or secondary scanning to provide efficient and accurate inspection of objects while maintaining a desired throughput of the inspection. In another implementation, a single scanner can be used to perform both the initial scanning and the additional scanning while maintaining a sufficient throughput of a line of objects under inspection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.