Device and method for optically measuring a measurement object

US10228551B1 · kind B1 · utility

Assignee

• PRECITEC OPTRONIK GMBH · DE

Inventors

• Christoph Dietz · Obertshausen, DE
• Martin Schönleber · Aschaffenburg, DE
• Jean-Francois Pichot · Saint-Maximin-la-Sainte-Baume, FR

Key dates

• Filing date: Aug 7, 2018
• Grant date: Mar 12, 2019
• Expiry date: Aug 7, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/0064
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A chromatic confocal measuring device includes a light source, which emits light of a plurality of wavelengths, and a first beam splitter, via which the light from the light source into an imaging optical unit having chromatic aberration on. Light reflected from the measurement object is imaged by the imaging optical unit and the first beam splitter onto a first confocal detection stop arrangement, such that the first confocal detection stop arrangement functions as a confocal aperture. Light incident through the first detection stop arrangement is detected and evaluated by a first detection device. The measuring device has a first slit stop, which functions as a confocal aperture of the measuring device. The measuring device additionally includes a second detection device and a second beam splitter, wherein the second beam splitter splits the light reflected from the measurement object into a first and a second partial beam, which image the same spatial region of the measurement object. The first detection device detects light of the first partial beam by a linear detector and evaluates total intensities over all wavelengths in order to create a total intensity profile and/or a to…