Systematic defects inspection method with combined eBeam inspection and net tracing classification
US10234500B2 · kind B2 · utility
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Key dates
| Filing date | Apr 17, 2015 |
| Grant date | Mar 19, 2019 |
| Priority date | — |
| Expiry date | Apr 29, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/307
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for separating real DVC via defects from nuisance based on Net Tracing Classification of eBeam VC die comparison inspection results are provided. Embodiments include performing an eBeam VC die comparison inspection on each via of a plurality of dies; determining DVC vias based on the comparison; performing a Net Tracing Classification on the DVC vias; determining S/D DVC vias based on the Net Tracing Classification; and performing a die repeater analysis on the S/D DVC vias to determine systematic design-related DVC via defects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.