Free access floor structure, and manufacturing apparatus and carrier apparatus adapted for floor structure
US10240350B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Dec 2, 2014 |
| Grant date | Mar 26, 2019 |
| Priority date | — |
| Expiry date | Feb 24, 2035 |
Classification
- Technology area (CPC E)Fixed Constructions
- CPC primaryE04F2290/02
- WIPO fieldTransport
- WIPO sectorMechanical engineering
Abstract
A free access floor structure to install a manufacturing apparatus such as a semiconductor manufacturing apparatus, in a short time, and a manufacturing apparatus and a carrier apparatus adapted for the floor structure. An embodiment of the manufacturing apparatus includes an apparatus-side connector which is provided, facing downward, to a bottom plate of a manufacturing apparatus. A floor structure of an embodiment includes a floor plate to be worked into a floor surface. The floor structure includes a floor-side connector which is provided, facing upward, to the floor plate so as to be connected with the apparatus-side connector according to a lowering operation of the manufacturing apparatus. An installation step (mounting step, piping/wiring step) of the manufacturing apparatus may thereby be performed in one step. As a result, the labor and the time required to install the manufacturing apparatus may be saved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.