Shiro Hara
27Patents
2h-index
40Co-inventors
57Inventor score
Filing activity: Dec 11, 2001 → Mar 23, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9281223B2 | Coupling system | Electricity | 265 | Active |
| US9016501B2 | Coupling transfer system | Performing Operations; Transporting | 3 | Active |
| US9209054B2 | Device manufacturing apparatus | Emerging Cross-Sectional Technologies | 2 | Active |
| US6702176B2 | Solder, method for processing surface of printed wiring board, and method for mounting electronic part | Performing Operations; Transporting | 2 | Expired |
| US9017146B2 | Wafer polishing apparatus | Performing Operations; Transporting | 1 | Active |
| US9777375B2 | Converging mirror furnace | Emerging Cross-Sectional Technologies | 1 | Active |
| US11056410B2 | Method of manufacturing semiconductor package using alignment mark on wafer | Electricity | 0 | Active |
| US9563136B2 | Yellow room system | Electricity | 0 | Active |
| US10632590B2 | Work processing apparatus and liquid chemical bag for the same | Performing Operations; Transporting | 0 | Active |
| US10431446B2 | Wet processing apparatus | Electricity | 0 | Active |
| US9478452B2 | Small production device and production system using the same | Electricity | 0 | Active |
| US9123795B2 | Method of manufacturing semiconductor wafers | Electricity | 0 | Active |
| US10304675B2 | System for integrating preceding steps and subsequent steps | Electricity | 0 | Active |
| US9513567B2 | Exposure apparatus and exposure method | Electricity | 0 | Active |
| US10115619B2 | Coupling transfer system | Performing Operations; Transporting | 0 | Active |
| US10186489B2 | Process substrate with crystal orientation mark, method of detecting crystal orientation, and reading device of crystal orientation mark | Electricity | 0 | Active |
| US10240350B2 | Free access floor structure, and manufacturing apparatus and carrier apparatus adapted for floor structure | Fixed Constructions | 0 | Active |
| US10163674B2 | Circular support substrate for semiconductor | Electricity | 0 | Active |
| US9254540B2 | Mounting structure of movable manufacturing device, fixing structure and movable manufacturing device | Performing Operations; Transporting | 0 | Active |
| US10163819B2 | Surface mount package and manufacturing method thereof | Electricity | 0 | Active |
| US10332768B2 | Compact manufacturing device, and inter-device transport system for production line | Electricity | 0 | Active |
| US9524895B2 | Substrate transfer antechamber mechanism | Electricity | 0 | Active |
| US10137570B2 | Link-type transfer robot | Electricity | 0 | Active |
| US10286426B2 | Columnar laminar flow generation device and method for generating columnar laminar flows | Electricity | 0 | Active |
| US11011403B2 | Transport container automatic clamping mechanism | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.