Shape measurement apparatus and shape measurement method
US10247544B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 20, 2016 |
| Grant date | Apr 2, 2019 |
| Priority date | — |
| Expiry date | Dec 20, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/306
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
[Object] To provide a shape measurement apparatus that is capable of measuring the amount of warpage in the width direction of a strip-shaped body with higher sensitivity.[Solution] Provided is a shape measurement apparatus including: a light source configured to irradiate a surface of a moving strip-shaped body with linear light at a prescribed angle of incidence; a screen configured such that reflected light of the linear light on the surface of the strip-shaped body is projected on the screen; an imaging unit configured to image the reflected light of the linear light projected on the screen; and an arithmetic processing unit configured to acquire the amount of warpage in a width direction of the strip-shaped body on the basis of a line length of the reflected light of the linear light imaged by the imaging unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.