Material measurement techniques using multiple X-ray micro-beams
US10247683B2 · kind B2 · utility
32Cited by
233References
23Claims
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Key dates
| Filing date | Dec 3, 2017 |
| Grant date | Apr 2, 2019 |
| Priority date | — |
| Expiry date | Dec 3, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/2204
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An x-ray interrogation system having one or more x-ray beams interrogates an object (i.e., object). A structured source producing an array of x-ray micro-sources can be imaged onto the object. Each of the one or more beams may have a high resolution, such as for example a diameter of about 15 microns or less, at the surface of the object. The illuminating one or more micro-beams can be high resolution in one dimension and/or two dimensions, and can be directed at the object to illuminate the object. The incident beam that illuminates the object has an energy that is greater than the x-ray fluorescence energy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.