Integrated air quality sensor that detects multiple gas species
US10254261B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 18, 2016 |
| Grant date | Apr 9, 2019 |
| Priority date | — |
| Expiry date | Dec 18, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/0047
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectronic device capable of detecting multiple gas constituents in ambient air can be used to monitor air quality. The microelectronic air quality monitor includes a plurality of temperature-sensitive gas sensors tuned to detect different gas species. Each gas sensor is tuned by programming an adjacent heater. An insulating air pocket formed below the sensor helps to maintain the sensor at a desired temperature. A temperature sensor may also be integrated with each gas sensor to provide additional feedback control. The heater, temperature sensor, and gas sensors are in the form of patternable thin films integrated on a single microchip. The device can be incorporated into computer workstations, smart phones, clothing, or other wearable accessories to function as a personal air quality monitor that is smaller, more accurate, and less expensive than existing air quality sensors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.