Microscope having low distortion aberration

US10254524B2 · kind B2 · utility

Assignee

• Carl Zeiss Microscopy GmbH · DE

Inventors

• Daniel Schwedt · Weimar, DE
• Tiemo Anhut · Jena, DE
• Matthias Wald · Jena, DE
• Beate Böhme · Kahla, DE
• Tobias Kaufhold · Jena, DE

Key dates

• Filing date: Nov 11, 2015
• Grant date: Apr 9, 2019
• Expiry date: Nov 11, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B27/0068
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Beam deflection units in light-scanning microscopes are usually arranged in planes that are conjugate to the objective pupil. The scan optics, which is required for generating the conjugate pupil planes, is complicated and not very light efficient. The invention is intended to enable a higher image quality, simpler adjustment and a lower light loss microscope. The optical system comprises a concave mirror (36) for imaging a respective point of the first and second beam deflection units (30A, 30B) onto one another. The concave mirror (36), the first beam deflection unit (30A), and the second beam deflection unit (30B) are arranged such that the illumination beam path is reflected exactly once at the concave mirror (36). A first distortion caused by the concave mirror (36) and a second distortion of the imaging caused by the first and second beam deflection units (30A, 30B) at least partly compensate for one another.