Patent · US Active

Precision clamp

US10259104B2 · kind B2 · utility

0Cited by

25References

27Claims

0Family size

Assignee

NIKON CORPORATION · JP

Inventors

Fardad Hashemi · Moraga, US
Travis Bow · Belmont, US
Patrick Shih Chang · San Mateo, US

Key dates

Filing date	Oct 28, 2014
Grant date	Apr 16, 2019
Priority date	—
Expiry date	Nov 30, 2034

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB25B5/06
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

A clamp for selectively inhibiting movement of a first object relative to a second object includes (i) a first clamp component coupled to the first object; (ii) a second clamp component coupled to the second object; and (iii) a fluid source that directs a fluid to the second clamp component to create a fluid bearing between the first clamp component and the second clamp component that allows for movement of the first clamp component relative to the second clamp component, and wherein the fluid source directs less fluid to the second clamp component to inhibit relative movement.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.