NIKON CORPORATION
9,024Patents
4,087Active
9,024Granted
56Portfolio score
Filing activity: Jul 17, 1985 → Feb 7, 2025 · 1,579 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5243195A | Projection exposure apparatus having an off-axis alignment system and method of alignment therefor | Physics | 722 | Expired |
| US9030166B2 | Electronic device, and method controlling electronic power supply | Emerging Cross-Sectional Technologies | 666 | Active |
| US6122036A | Projection exposure apparatus and method | Physics | 584 | Expired |
| US6341007B1 | Exposure apparatus and method | Physics | 549 | Expired |
| US6633364B2 | Exposure apparatus, exposure method, and device manufacturing method | Physics | 538 | Expired |
| US7489389B2 | Stage device with frame-shaped member movable in at least three degrees of freedom within a two-dimensional plane | Electricity | 537 | Expired |
| US8072578B2 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Emerging Cross-Sectional Technologies | 534 | Active |
| US6590634B1 | Exposure apparatus and method | Physics | 470 | Expired |
| US6600547B2 | Sliding seal | Physics | 469 | Expired |
| US6710857B2 | Substrate holding apparatus and exposure apparatus including substrate holding apparatus | Physics | 469 | Expired |
| US6432849B1 | Substrate storage cassette positioning device and method | Electricity | 463 | Expired |
| US5874820A | Window frame-guided stage mechanism | Emerging Cross-Sectional Technologies | 439 | Expired |
| US5448332A | Exposure method and apparatus | Physics | 419 | Expired |
| US6400441B1 | Projection exposure apparatus and method | Physics | 398 | Expired |
| US6633365B2 | Projection optical system and exposure apparatus having the projection optical system | Physics | 322 | Expired |
| US6549269B1 | Exposure apparatus and an exposure method | Physics | 321 | Expired |
| US5646413A | Exposure apparatus and method which synchronously moves the mask and the substrate to measure displacement | Physics | 311 | Expired |
| US6795169B2 | Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus | Physics | 256 | Expired |
| US7023610B2 | Ultraviolet laser apparatus and exposure apparatus using same | Electricity | 252 | Expired |
| US5579147A | Scanning light exposure apparatus | Physics | 249 | Expired |
| US6897963B1 | Stage device and exposure apparatus | Physics | 244 | Expired |
| US6811953B2 | Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdevice | Physics | 234 | Expired |
| US5500736A | Method of detecting positions | Physics | 230 | Expired |
| US5194893A | Exposure method and projection exposure apparatus | Physics | 222 | Expired |
| USD715811S1 | Display screen with a graphical user interface | General | 219 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.