Chromatic confocal distance sensor
US10260941B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 4, 2016 |
| Grant date | Apr 16, 2019 |
| Priority date | — |
| Expiry date | Oct 4, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2210/50
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A chromatic confocal distance sensor has a housing in which a polychromatic light source, imaging optics having a longitudinal chromatic aberration, a spectrometer and a planar beam splitter surface are arranged. These lie in the light path of the measurement light between the light source and the imaging optics and between the imaging optics and the spectrometer. A first diaphragm is arranged in the light path between the light source and the beam splitter surface, and a second diaphragm is arranged in the light path between the beam splitter surface and the spectrometer. The diaphragms are arranged mirror-symmetrically with respect to the beam splitter surface. The measurement light propagates as a free beam inside the housing. The beam splitter surface, the first diaphragm and the second diaphragm are fastened together on a carrier which has an isotropic thermal expansion coefficient. This way, temperature changes cannot significantly affect the measurement accuracy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.