Method of fabricating a FET transistor having a strained channel
US10263077B1 · kind B1 · utility
7Cited by
3References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 22, 2017 |
| Grant date | Apr 16, 2019 |
| Priority date | — |
| Expiry date | Dec 22, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D62/822
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Method for fabricating at least one FET transistor (100a, 100b) comprising:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.