Determination of operability of a digital scanner with shearing interferometry
US10267625B2 · kind B2 · utility
1Cited by
3References
26Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 15, 2018 |
| Grant date | Apr 23, 2019 |
| Priority date | — |
| Expiry date | Feb 15, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70591
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
System and method for monitoring of performance of a mirror array of a digital scanner with a use of a lateral shearing interferometer (operated in either static or a phase-shifting condition) to either simply identify problematic pixels for further troubleshooting or measure the exact magnitude of the mirror's deformation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.