Device and method for determining the concentration of a vapor by means of an oscillating body sensor

US10267768B2 · kind B2 · utility

Assignee

• AIXTRON SE · DE

Inventors

• Birgit Irmgard Beccard · Aachen, DE
• Claudia Cremer · Lich, DE
• Karl-Heinz Trimborn · Wegberg, DE
• Michael D. Long · Santa Cruz, US
• Andy EICHLER · Aachen, DE
• Nael Al Ahmad · Düren, DE

Key dates

• Filing date: Feb 23, 2015
• Grant date: Apr 23, 2019
• Expiry date: Mar 23, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2291/02809
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A device and a method determines the concentration of a vapor in a volume, in particular for determining or controlling the mass flow of the vapor being conveyed through the volume by a carrier gas. The device comprises a sensor, which supplies a sensor signal that is dependent on the concentration or partial pressure of the vapor. The sensor has an oscillatory body that can be brought to oscillation, the oscillation frequency of which is influenced by a mass accumulation formed on a surface of the oscillating body by the condensed vapor. The oscillating body has a temperature control unit, by means of which the oscillating body can be brought to a temperature below the condensation temperature of the vapor. An evaluation unit determines the concentration or the partial pressure of the vapor from the temporal change of the oscillator frequency.