Seal for wafer processing assembly
US10269595B2 · kind B2 · utility
0Cited by
8References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 11, 2016 |
| Grant date | Apr 23, 2019 |
| Priority date | — |
| Expiry date | Jan 10, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6719
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A seal having a cross-sectional profile that includes a first lobe, a second lobe, and a corner having an angle between 45 and 90 degrees, inclusive, a first side extending from the first lobe to the corner and a second side extending from the second lobe to the corner, where the first side and the second side define the corner angle. The seal can be seated in a groove so that the first lobe and the corner are in the groove and the second lobe extends from the groove. In use, the second lobe folds into the groove to form a fluid-tight seal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.