Veeco Instruments Inc.
🏢 View company profile →307Patents
171Active
307Granted
54Portfolio score
Filing activity: Jan 16, 1978 → Aug 27, 2021 · 69 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| USD810705S1 | Self-centering wafer carrier for chemical vapor deposition | General | 463 | Active |
| US4184188A | Substrate clamping technique in IC fabrication processes | Emerging Cross-Sectional Technologies | 428 | Expired |
| USD819580S1 | Self-centering wafer carrier for chemical vapor deposition | General | 426 | Active |
| US10134617B2 | Wafer carrier having thermal cover for chemical vapor deposition systems | Emerging Cross-Sectional Technologies | 351 | Active |
| US6238582A | Reactive ion beam etching method and a thin film head fabricated using the method | Physics | 288 | Expired |
| US6556305B1 | Pulsed source scanning interferometer | Physics | 163 | Expired |
| US4778561A | Electron cyclotron resonance plasma source | Electricity | 110 | Expired |
| US4949783A | Substrate transport and cooling apparatus and method for same | Electricity | 110 | Expired |
| US7001785B1 | Capacitance probe for thin dielectric film characterization | Physics | 104 | Expired |
| US6280939A | Method and apparatus for DNA sequencing using a local sensitive force detector | Emerging Cross-Sectional Technologies | 104 | Expired |
| US7770231B2 | Fast-scanning SPM and method of operating same | Physics | 69 | Active |
| US4675796A | High switching frequency converter auxiliary magnetic winding and snubber circuit | Electricity | 66 | Expired |
| US6624894B2 | Scanning interferometry with reference signal | Physics | 65 | Expired |
| US6449048B1 | Lateral-scanning interferometer with tilted optical axis | Physics | 64 | Expired |
| US6545761B1 | Embedded interferometer for reference-mirror calibration of interferometric microscope | Physics | 62 | Expired |
| US7037574B2 | Atomic layer deposition for fabricating thin films | Emerging Cross-Sectional Technologies | 61 | Expired |
| US6794951B2 | Solid state RF power switching network | Electricity | 60 | Expired |
| US6537428B1 | Stable high rate reactive sputtering | Electricity | 56 | Expired |
| US4791544A | Regulating control for single-ended switching power supply | Emerging Cross-Sectional Technologies | 55 | Expired |
| US7055378B2 | System for wide frequency dynamic nanomechanical analysis | Physics | 51 | Expired |
| USRE36488E | Tapping atomic force microscope with phase or frequency detection | General | 44 | Expired |
| US6299740A | Sputtering assembly and target therefor | Chemistry; Metallurgy | 38 | Expired |
| USD686582S1 | Wafer carrier having pockets | General | 37 | Active |
| US4465934A | Parallel charged particle beam exposure system | Electricity | 35 | Expired |
| US7119909B2 | Film thickness and boundary characterization by interferometric profilometry | Physics | 34 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.