Droplet detector and extreme ultraviolet light generating apparatus
US10271414B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 7, 2017 |
| Grant date | Apr 23, 2019 |
| Priority date | — |
| Expiry date | Sep 7, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K2201/06
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
The stability of operations of an EUV light generating apparatus is improved. A droplet detector may include: a light source unit configured to emit illuminating light onto a droplet, which is output into a chamber and generate extreme ultraviolet light when irradiated with a laser beam; a light receiving unit configured to receive the illuminating light and to detect changes in light intensities; and a timing determining circuit configured to output a droplet detection signal that indicates that the droplet has been detected at a predetermined position within the chamber, based on a first timing at which the light intensity of the illuminating light decreases due to the droplet being irradiated therewith and a second timing at which the light intensity of the illuminating light increases.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.