Gigaphoton Inc.
567Patents
543Active
567Granted
62Portfolio score
Filing activity: Mar 29, 2001 → Nov 9, 2023 · 58 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6987279B2 | Light source device and exposure equipment using the same | Physics | 41 | Expired |
| US7271401B2 | Extreme ultra violet light source device | Physics | 39 | Expired |
| US6721344B2 | Injection locking type or MOPA type of laser device | Electricity | 35 | Expired |
| US8242472B2 | Extreme ultraviolet light source device and control method for extreme ultraviolet light source device | Electricity | 28 | Active |
| US7608846B2 | Extreme ultra violet light source device | Electricity | 27 | Active |
| US7999241B2 | Extreme ultraviolet light source apparatus | Electricity | 26 | Active |
| US8324600B2 | Apparatus and method for measuring and controlling target trajectory in chamber apparatus | Electricity | 22 | Active |
| US7923705B2 | Extreme ultra violet light source apparatus | Electricity | 21 | Active |
| US9131589B2 | Extreme ultraviolet light generation apparatus and control method for laser apparatus in extreme ultraviolet light generation system | Electricity | 21 | Active |
| US6741627B2 | Photolithographic molecular fluorine laser system | Electricity | 20 | Expired |
| US7297968B2 | Debris collector for EUV light generator | Physics | 18 | Expired |
| US7615766B2 | Target supplier | Electricity | 16 | Active |
| US6810061B2 | Discharge electrode and discharge electrode manufacturing method | Electricity | 16 | Expired |
| US7705333B2 | Extreme ultra violet light source apparatus | Electricity | 16 | Active |
| US7067832B2 | Extreme ultraviolet light source | Electricity | 16 | Expired |
| US8395133B2 | Apparatus and method of adjusting a laser light source for an EUV source device | Electricity | 15 | Active |
| US7915600B2 | Extreme ultra violet light source apparatus | Physics | 14 | Active |
| US8669543B2 | System and method for generating extreme ultraviolet light, and laser apparatus | Electricity | 13 | Active |
| US8067756B2 | Extreme ultraviolet light source apparatus | Electricity | 13 | Active |
| US8003963B2 | Extreme ultraviolet light source apparatus | Physics | 13 | Active |
| US9072153B2 | Extreme ultraviolet light generation system utilizing a pre-pulse to create a diffused dome shaped target | Electricity | 12 | Active |
| US7072375B2 | Line-narrowed gas laser system | Electricity | 11 | Expired |
| US9113540B2 | System and method for generating extreme ultraviolet light | Electricity | 10 | Active |
| US8586954B2 | Extreme ultraviolet light source apparatus | Electricity | 10 | Active |
| US7382816B2 | Two-stage laser pulse energy control device and two-stage laser system | Electricity | 10 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.