Archimedes brush for semiconductor cleaning
US10271636B2 · kind B2 · utility
4Cited by
7References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 10, 2014 |
| Grant date | Apr 30, 2019 |
| Priority date | — |
| Expiry date | Dec 31, 2037 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA46D1/0207
- WIPO fieldOther consumer goods
- WIPO sectorOther fields
Abstract
A cleaning device for cleaning a substrate is provided. In one aspect, the cleaning device includes a brush engaged with a mandrel, and the brush forms an Archimedean screw thread form. The brush is formed of an absorbent material, preferably foam. In one aspect, the brush is seated within a groove in the mandrel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.