Aerosol coating method and plasma-resistant member formed by the same
US10272467B2 · kind B2 · utility
1Cited by
2References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 28, 2013 |
| Grant date | Apr 30, 2019 |
| Priority date | — |
| Expiry date | Sep 16, 2034 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C24/04
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
According to an aerosol coating method, a heat treatment process of preliminary ceramic particles having a first mean particle size (D50) is performed to form ceramic particles having a second mean particle size (D50) in micro unit larger than the first mean particle size. Thereafter, the ceramic particles are mixed with a carrier gas to form an aerosol. The aerosol is sprayed toward the base to form a ceramic coating film on the base.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.